Agilent Technologies 16440A Manual de usuario descargar pdf (Pagina 3)

For example, accuracy specifications are

given as ±% of set/measured value (0.02%)

plus offset value (1mV+13µV×Vi) for the 2V

range. The differential mode offset value

consists of a fixed part determined by the

measurement range and a proportional part

that is multiplied by Vi.

VMU Supplemental Information:

Input Impedance: ≥1GΩ

Input leakage current (@0V): ≤ 500pA

(Typical)

Measurement noise: 0.01% of range

(p-p) (Typical)

Differential mode measurement noise:

0.005% of range (p-p) (Typical)

VMU

(Voltage Monitor

Unit)

VMU Measurement Range,

Resolution, and Accuracy:

±(0.02%+1mV)20µV±20V

±(0.02%+200µV)2µV±2V

Meas.

Accuracy

Meas.

Reso.

Voltage

Range

VMU Differential Mode Range

Resolution, and Accuracy:

±(0.02%+100µV+3 µ V × Vi)2µV±2V

±(0.03% + 10µV+0.3µV×Vi)µV±0.2V 0.2

Meas.

Accuracy

Meas.

Reso.

Diff V

Range

Max. Common Mode Voltage: ± 20V

Note: Vi is the input voltage of VMU2 in

volts.

VSU (Voltage Source Unit)

Specifications

VSU Output Range:

±(0.05% of setting+10mV)

1mV

±20V

Meas.

Accuracy

Meas.

Reso.

Voltage

Range

*1: Specification is applicable under no load

current.

Max. Output Current: 100mA

VSU Supplemental Information:

Output resistance: 0.2Ω

Maximum load capacitance: 10µF

Maximum slew rate: 0.2V/µs

Current limit: 120mA (typical)

Output Noise: 1mV rms (typical)

Agilent 4155C Semiconductor Parameter Analyzer

Output terminal/connection:

Single triaxial connector, non-Kelvin

(no remote sensing)

Voltage/Current Compliance

(Limiting):

The SMU can limit output voltage or

current to prevent damaging the device

under test.

Voltage: 0V to ±100V

Current: ±1pA to ±100mA

Compliance Accuracy: Same as the

current (voltage) settling accuracy.

MPSMU Supplemental Information:

Typical voltage source output

resistance: 0.3Ω

Voltage measurement input resistance/

current source output resistance:

≥10

Ω (1nA range)

Current compliance setting accuracy for

opposite polarity:

1nA to 10nA range: V/I setting

accuracy ± 12% of range

MPSMU

(Medium Power SMU) Specifications

Voltage Range, Resolution, and Accuracy (MPSMU)

±(0.03%+5mV+0.3×Iout)100µV±(0.04%+15mV)+0.3×Iout)

5mV

± 100V

±(0.02%+3mV+0.3×Iout)40µV±(0.03%+7mV)+0.3×Iout)

2mV

± 40V

100mA

±(0.02%+2mV+0.3×Iout)20µV±(0.03%+4mV+0.3×Iout)

1mV

± 20V

100mA

±(0.02%+700µV+0.3×Iout) 2µV±(0.03%+900µV+0.3×Iout)100µV± 2V

Max.

Current

Meas.

Accuracy

Meas.

Reso.

Set.

Accuracy

Set.

Reso.

Voltage

Range

*1: 100mA (Vout 20V), 50mA (20V<Vout≤40V)

*2: 100mA (Vout 20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)

Current Range, Resolution, and Accuracy (MPSMU)

±(0.1%+30µA+200nA×Vout)

100nA

±(0.12%+50µA+200nA×Vout)10µA±100mΑ

100V

±(0.1%+2µA+20nA×Vout)

10nA

±(0.12%+4µA+20nA×Vout)1µA±10mA

100V

±(0.1%+300nA+2nA×Vout)

1nA

±(0.12%+500nA+2nA×Vout)

100nA

±1mA

100V

±(0.1%+20nA+200pA×Vout)

100pA

±(0.12%+40nA+200pA×Vout)

10nA

±100µA

100V

±(0.1%+3nA+20pA×Vout)

10pA

±(0.12%+5nA+20pA×Vout)

1nA

±10µA

100V

±(0.1%+200pA+2pA×Vout)

1pA

±(0.12%+400pA+2pA×Vout)

100pA

±1µA

100V

±(0.1%+30pA+200fA×Vout)

100fA

±(0.12%+50pA+200fA×Vout)

10pA±100nA

100V

±(0.5%+5pA+20fA×Vout)

10fA

±(0.5%+7pA+20fA×Vout)

1pA±10nA

100V

±(0.5%+3pA+2fA×Vout)

10fA

±(0.5%+3pA+2fA×Vout)

100fA±1nA

Max.

Meas.

Accuracy

Meas.

Reso.

Set.

Accuracy

Set.

Reso.

Current

Range

*1: 100V (Iout 20mA), 40V (20mA<Iout≤50mA), 20V (50mA<Iout≤100mA)

100nA to 100mA range: V/I setting

accuracy ± 2.5% of range

Current (mA)

Voltage (V)

100

MPSMU Measurement and

Output Range

-20

-50

-100

100

-100

-20-40 20 40

Vout is the output voltage in volts.

Iout is the output current in amps.

For example, accuracy specifications are

given as ±% of set/measured value (0.1%)

plus offset value (30pA+200fA×Vout) for the

100nA range. The offset value consists of a

fixed part determined by the set/measuremet

range and a proportional part that is

multiplied by Vout.

VSU Specifications

Same as 4156C VSU.

VMU

Specifications

Same as 4156C VMU.

Specifications

1 2 3 4 5 6 7 8 9 10

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Agilent Technologies 16440A Manual de usuario Pagina 3

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