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Agilent E5250A User’s Guide, Edition 11 9-7
Executing Sample Programs
Vth and Capacitance Measurement Program
Setting up the Measurement Environment
Before executing the program, you need to set up the measurement environment.
Table 9-3 lists the required equipment.
Connect the E5250A output to Device Under Test (DUT). For details, refer to
“Setting up Measurement Environment” on page 4-1.
And connect all equipment as shown in Figure 9-1 and Table 9-4. The E5252A must
be installed in slot1 of the E5250A.
Table 9-3 Required Equipments
Agilent Model/Part No. Description Qty.
E5250A Low Leakage Switch Mainframe 1
E5252A 10×12 Matrix Switch 1
4155/4156 Semiconductor Parameter Analyzer 1
16494A-003 Triaxial Cable (80 cm) 4
16494A-001 or -002 Triaxial Cable (1.5 m or 3 m) 6
16495F Connector Plate 1
4284A with 4284A-006 Precision LCR Meter 1
16048D/E Test Lead 1
1250-2405 BNC T-type Adapter 2
10833A/B/C GPIB Cable 3
- Agilent E5250A 1
- Manual Part Number 2
- Warranty 2
- Technology Licenses 2
- Restricted Rights Legend 2
- Safety Summary 5
- Safety Symbols 7
- In This Manual 8
- Contents 11
- 1 Introduction 17
- Front Panel Tour 20
- Rear Panel Tour 20
- Options and Accessories 28
- 2 Installation 33
- Requirements 36
- Installation 37
- Operating Environment 38
- Installing the E5250A 39
- To Install Plug-in Card 40
- To Install Blank Panel 41
- To Configure E5255A 42
- To Modify BIAS Input 43
- To Mount Protective Resistors 44
- E5255A Configuration Examples 45
- To Bias Source 47
- BNC T-adapter 47
- BNC cable 47
- Agilent E5255A 47
- To Set GPIB Address 49
- To Connect GPIB Cable 49
- Maintenance 50
- Executing Self-Test 53
- Executing the Controller Test 54
- Executing the Relay Test 54
- Relay Test Adapter 55
- SCPI Commands for Self-Test 56
- Local/Self Test key on the 57
- Self-Test Programming Example 58
- Using the Self-Test Utility 60
- To Execute Self-Test 62
- To Execute Leak Test 65
- Connector Plates 73
- Blank Plate 74
- Mounting Connectors Directly 76
- 2 − ∅11.3 ∅3.2 2 − M3 x 0.5 77
- 14 11 11 14 77
- To Make Interlock Circuit 78
- To Install LED Circuit 80
- To Connect Connectors to DUT 83
- Connecting the E5250A Input 85
- Kelvin Triaxial Cable 87
- BNC Cable 87
- INTLK Cable 87
- Connecting the E5250A Output 90
- Connector Plate Side 91
- E5252A Side 91
- To Connect the E5255A Output 92
- Measurement Cable Length 93
- 5 Controlling the E5250A 95
- Creating Your Own Program 97
- Modifying a Sample Program 98
- Channel Configuration 102
- Connection Rule 103
- Connection Sequence 104
- Bias Mode 105
- Couple Port 107
- E5252A Channel List 109
- Switch Control Basics 110
- Controlling the E5250A 110
- Auto Configuration Mode 111
- E5255A Channel List 113
- GET "_" 121
- E5252A 10x12 Matrix Switch 122
- Changing the VFP Setup Mode 123
- To change the Bias Mode state 124
- Enter key 125
- To copy a setup memory 128
- Clear all setup memory. OK? 129
- Enter key. If you 133
- Enter key. Current Setup 133
- Input Save file name 136
- Input Load file name 136
- 6 Programming the E5250A 137
- SCPI Programming Basics 139
- :ROUT:CONN:RULE ALL,FREE 140
- :ROUT:CONN:SEQ ALL,BBM 140
- 10 ASSIGN @Hp5250 TO 722 141
- Creating a Control Program 142
- Defining Connection Rule 144
- Defining Connection Sequence 145
- Using Bias Mode 146
- Controlling Relay Switching 148
- Programming Examples 149
- Channel Creation Example 150
- Bias Mode Example 152
- Couple Port Example 155
- VFP Data Upload Library 159
- Connect_vfp subprogram 160
- FNGet_vfp_comment$ subprogram 160
- Programming Example 161
- GET "UPLOAD" 162
- RE-STORE "U_LIB" 162
- MSI ":CS80,701,1" 162
- Error Messages 163
- Required Conditions 166
- FORCE or SENSE (A) 167
- FORCE or SENSE (B) 167
- Insulator 167
- Triaxial Cable 167
- 7 Command Reference 169
- Common Commands 172
- :DIAGnostic Subsystem 183
- :DIAGnostic:TEST:CARD:CLEar 184
- :DIAGnostic:TEST:CARD:STATe? 185
- :DIAGnostic:TEST:FRAMe:CLEar 185
- :ROUTe Subsystem 188
- ENTER @Hp5250;A$ 191
- [:ROUTe]:BIAS:PORT 195
- [:ROUTe]:BIAS:PORT? 196
- [:ROUTe]:BIAS[:STATe] 197
- [:ROUTe]:BIAS[:STATe]? 198
- [:ROUTe]:CLOSe:CARD? 198
- [:ROUTe]:CLOSe[:LIST] 199
- [:ROUTe]:CLOSe[:LIST]? 199
- [:ROUTe]:CONNection:RULE 200
- [:ROUTe]:CONNection:RULE? 200
- [:ROUTe]:CONNection:SEQuence 201
- [:ROUTe]:COUPle:PORT 203
- [:ROUTe]:COUPle:PORT? 204
- [:ROUTe]:COUPle[:STATe] 205
- [:ROUTe]:COUPle[:STATe]? 206
- [:ROUTe]:FUNCtion 207
- [:ROUTe]:FUNCtion? 207
- [:ROUTe]:OPEN:CARD 208
- [:ROUTe]:OPEN[:LIST] 208
- [:ROUTe]:OPEN[:LIST]? 209
- :SYSTem Subsystem 210
- :SYSTem:CCONfig? 211
- :SYSTem:CDEScription? 212
- :SYSTem:CPON 213
- :SYSTem:CTYPe? 214
- :SYSTem:ERRor? 215
- :SYSTem:VERSion? 215
- Status Reporting Structure 216
- Status Byte Register 218
- Output Queue 223
- Command Reference 224
- 8 VXIplug&play Driver 225
- System Requirements 227
- Driver Functions 229
- VXIplug&play Driver 256
- 9 Executing Sample Programs 257
- Introduction 259
- Vth Measurement Setup 261
- Capacitance Measurement Setup 262
- MSI ":CS80,702,1" 265
- GET "SP_MAT" 265
- RE-STORE "P_MAT" 265
- GET "C_COMPEN" 265
- RE-STORE "C_COM" 265
- Modifying the Program 267
- HCI Measurement Program 273
- SMU1 VG IG V VAR1 275
- SMU3 VD ID V CONST 275
- SMU4 VB IB V CONST 275
- GNDU VS IS COMMON CONST 275
- Required Equipments 278
- BIAS SOURCE 1 282
- HP BASIC 282
- CONTROLLER 282
- BIAS SOURCE 3 282
- BIAS SOURCE 2 282
- LOAD "SP_MUX" 283
- Executing Sample Programs 284
- To Execute HCI Test Program 285
- GET "SP_MUX_A" 288
- MSI "/test_data" 288
- ID=1 μA × W/L 292
- To change the stress times 293
- To change the test limits 294
- 10 Specifications 295
- General Specifications 297
- Option 001 Matrix Switch 298
- Typical Data 299
- Supplemental Data 299
- Option 501 Multiplexer 300
- Accessories 302
- 4155/4156 303
- Specifications 304
- 11 Error Messages 305
- Standard SCPI Error Messages 307
- Execution Error 311
- Device-Dependent Errors 312
- Query Errors 313
- 12 SCPI Command Summary 319
- SCPI Command Summary 321
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