Maximum DUT Pins
48 output pins plus one pin for
the prober chuck connection
(triaxial connector). Only the
E3122A (high-resolution pin
board) can be used for the 4073A
(The E3121A cannot be used).
Maximum Number of Instrument
Ports
SMU Ports in Testhead
(Eight SMUs + one GNDU):
Two ports for low-current
measurement (Non-Kelvin)
Four ports (Kelvin)
Two ports (Non-Kelvin)
One port for GNDU (Kelvin)
Auxiliary (AUX) ports:
Eight ports for external instru-
ments (C-Meter, digital voltme-
ter, etc.) 2 triaxial input ports
(Force/Guard/Common, AUX
ports 1 and 2)
Four BNC two-pair input
ports (Force/Common and
Sense/Common, AUX ports 3
to 6)
Two BNC input ports (Force/
Common, AUX ports 7 and 8)
High Frequency (HF) ports:
Six for pulse generator (81110A,
8114A or HV-SPGU) or other
external instruments.
HF ports 1 through 3 can access
measurement pins 1 through
24, and HF ports 4 through 6
can access measurement pins
25 through 48. The user has the
option of connecting any of the
following HF port pairs to-
gether via a 1 TO 2 ADAPTOR
in order to access all (1 through
48) measurement pins: HF
ports 1 and 4, HF ports 2 and 5,
and HF ports 3 and 6.
Extended path:
48 extended paths – The
system provides one on/off
relay for each path.
Pulse switch input/output ports:
Please refer to page 4.
Maximum Voltage at Each Port
SMU port in Test Head: ±200 V
AUX port:
±200 V (AUX ports 1 and 2)
±100 V (AUX ports 3 to 8)
Testhead Circuit Diagram
Pulse Switch
(Refer to page 4.)
HF port:
±100 V (between force and
common of each HF port)
±100 V (between two of forces
of all HF ports)
±100 V (between any force of
HF ports and any force of
extended paths)
Extended path:
±100 V (between force and
common of each extended
path)
±100 V (between any force of
HF ports and any force of
extended paths)
Zero reference: ±200 mV
Maximum Current, Port to DUT
Pin
SMU port in Test Head: ±1.0 A
GNDU: ±1.6 A
AUX port: ±1.0 A
HF port: ±0.5 A
Extended path: ±0.5 A
Maximum Residual Resistance
Through AUX port
Low current port: Force 1.0 Ω
Kelvin port: Force 1.0 Ω
Sense 2.5 Ω
Non-Kelvin port: Force 1.0 Ω
Through HF port (supplemental
characteristics): 2.0 Ω
Maximum Stray Capacitance
between DUT Pins (supplemental
characteristics)
3 pF
Isolation Resistance (supplemen-
tal characteristics)
Low Current (with Guard):
1
×
10
15
Ω
HF Port Bandwidth (@–3dB)
(supplemental characteristics)
60 MHz (50 Ω load impedance:
from port to DUT pin, 3
×
24
configuration)
HF Port Cross Talk Between Pins
(supplemental characteristics)
±2 % (5 kΩ load impedance: from
port to DUT pin, 20 ns pulse
transition time)
Switching Matrix Subsystem
3
(428 paginas)
(18 paginas)
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