Maximum Output Voltage/Current
Over Current Range:
15% of range (0% for 100 mA
range of MPSMU/HRSMU, 0%
for 1 A range of HPSMU, 5% for
10 pA/100 pA range of HRSMU)
Over Voltage Range:
V Force: % of range
V Measure: 10% of range
(0% for 100 V range of
MPSMU, 0% for 200 V range
of HPSMU)
Current Compliance Setting
Range:
1 pA to maximum current
Accuracy of converse polar
current limit:
3
±2% of range (100 nA to 1 A
ranges)
DC Measurement Subsystem (continued)
6
Current Source/Monitor Range, Resolution, and Accuracy using an MPSMU connected ports SMU1 and SMU2
Current Source/Monitor Range, Resolution, and Accuracy using an MPSMU or HPSMU connected to the SMU3 through SMU8 ports
Note: The HPSMU can only be connected to the SMU3 and SMU4 ports.
Note: Current measurement ccuracy of the SMU may be affected by electromagnetic field strength over 3 V/m at a frequency of 26 MHz to 1 GHz.
±10% of range (10 pA to 10 nA
ranges)
Maximum Capacitive Load: ≤1000pF
Maximum Allowable Guard
Capacitance:
250 pF (between signal line and
Force Accuracy is calculated as follows: ±(a % of output setting value + b% of output current range + c) (A)
Measure Accuracy is calculated as follows: ±(a % of measured value + b% of current measurement range + c) (A)
Using HPSMU
1
Using HPSMU,
2
Suplemental characteristics when using the SMU3 to SMU8 ports
Vo = Output voltage
Using MPSMU/HRSMU
guard line outside of matrix)
Maximum Slew Rate: 0.2 V/µs
Note: The HPSMU cannot be connected to SMU1 and SMU2 ports.
Current measurement accuracy of the SMU may be affected by electromagnetic field strength over 3 V/m at a frequency of 26 MHz to 1 GHz.
±1 A
1
50 µA 50 µA 1 µA
±100 mA 5 µA 5 µA 100 nA
±10 mA 500 nA 500 nA 10 nA
±1 mA 50 nA 50 nA 1 nA
±100 µA 5 nA 5 nA 100 pA
±10 µA 500 pA 500 pA 10 pA
±1 µA 50 pA 50 pA 1 pA
±100 nA 5 pA 5 pA 100 fA
±10 nA
2
500 fA 500 fA 10 fA
±1 nA
2
50 fA 50 fA 10 fA
a: 0.5 %
b: 0.05 + 0.0005 × Vo %
c: 0
a: 0.1 %
b: 0.05 + 0.0005 × Vo %
c: 0
a: 1 %
b: 0.1 + 0.0005 × Vo %
c: 303 pA + 10 pA/V × Vo
a: 0.2 %
b: 0.05 + 0.0005 × Vo %
c: 300 pA + 10 pA/V × Vo
±100 mA
±10 mA
±1 mA
±100 µA
±10 µA
±1 µA
±100 nA
±10 nA
±1 nA
5 µA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
500 fA
50 fA
5 µA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
500 fA
50 fA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
100 fA
10 fA
10 fA
a: 0.12%
b: 0.1 + 0.0005 × Vo %
c: 0
a: 0.2%
b: 0.1 + 0.0005 × Vo %
c: 0.02 pA/V × Vo
a: 1%
b: 0.1 + 0.0005 × Vo %
c: 3 pA + 0.02 pA/V × Vo
a: 0.1%
b: 0.05 + 0.0005 × Vo %
c: 0
a: 0.2%
b: 0.05 + 0.0005 × Vo %
c: 0.02 pA/V × Vo
a: 1%
b: 0.1 + 0.0005 × Vo %
c: 3 pA + 0.02 pA/V × Vo
Full Scale Measure Resolution: Measure Resolution:
Current Range Force Resolution High Speed Precision Force Accuracy Measure Accuracy
Full Scale Measure Resolution: Measure Resolution:
Current Range Force Resolution High Speed Precision Force Accuracy Measure Accuracy
a: 1%
b: 0.1 + 0.0005 × Vo %
c: 303 pA + 10 pA/V × Vo
a: 0.5 %
b: 0.1 + 0.0005 × Vo%
c: 0
a: 0.12 %
b: 0.1 + 0.0005 × Vo %
c: 0
a: 0.2 %
b: 0.1 + 0.0005 × Vo %
c: 300 pA + 10 pA/V × Vo
Current (mA)
Current (mA)
Voltage(V)
Voltage(V)
(428 paginas)
(18 paginas)
Manymanuals.com
Manymanuals.de
Manymanuals.fr
Manymanuals.it
Manymanuals.pl
Manymanuals.cz
Manymanuals.es
Manymanuals-pt.com
Comentarios a estos manuales