Agilent Technologies Agilent E5250A Manual de usuario descargar pdf (Pagina 3)

VMU Measurement Range, Resolution,

and Accuracy:

Voltage Meas. Meas.

Range Reso. Accuracy

±2V 2µV ±(0.02%+200µV)

±20V 20µV ± (0.02%+1mV)

VMU Supplemental Information:

Input Impedance: ³1G W

Input leakage current (@0 V): £500 pA

Measurement noise: 0.01% of range

(p-p) (typical) when integration time

is 10 PLC

Differential mode measurement noise:

0.005% of range (p-p) (typical) when

integration time is short.

VSU (Voltage Source Unit)

Specifications

VSU Output Range:

Voltage Meas. Meas.

Range Reso. Accuracy

±20V 1mV ± (0.05% of setting +10mV)

Specification is applicable under no load

current. Max. Output Current: 100mA

VSU Supplemental Information:

Output resistance: 0.2 W (typical)

Maximum load capacitance: 10 µF

Maximum slew rate: 0.2 V/µs

Current limit: 120 mA (typical)

Output Noise: 1 mV rms (typical)

VMU Differential Mode Range,

Resolution, and Accuracy:

Diff V Meas. Meas.

Range Reso. Accuracy

±0.2V 0.2µV ±(0.03%+10µV+0.3µV×Vi)

±2V 2µV ±(0.02%+100µV+3µV×Vi)

Max. Common Mode Voltage: ± 20V

Note: Vi is the input voltage of VMU2 in volts.

For example, accuracy specifications are

given as ±% of set/measured value (0.02%)

plus offset value (100µV+3µV×Vi) for the 2V

range. The differential mode offset value

consists of a fixed part determined by the

measurement range and a proportional part

that is multiplied by Vi.

MPSMU (Medium Power SMU) Specifications

Voltage Range, Resolution, and Accuracy (MPSMU)

Voltage Set. Set. Meas. Meas. Max.

Range Reso. Accuracy Reso. Accuracy Current

±2V 100µV ±(0.03%+900µV+0.3×Iout) 2µV ±(0.02%+700µV+0.3×Iout) 100mA

±20V 1mV ±(0.03%+4mV+0.3×Iout) 20µV ±(0.02%+2mV+0.3×Iout) 100mA

±40V 2mV ±(0.03%+7mV+0.3×Iout) 40µV ±(0.02%+3mV+0.3×Iout)

±100V 5mV ±(0.04%+15mV+0.3×Iout) 100µV ±(0.03%+5mV+0.3×Iout)

100mA (Vout £20V), 50mA (20V<Vout £40V)

100mA (Vout £20V), 50mA (20V<Vout £40V), 20mA (40V<Vout£100V)

Agilent 4155C Semiconductor Parameter Analyzer

Current Range, Resolution, and Accuracy (MPSMU)

Current Set. Set. Meas. Meas. Max.

Range Reso. Accuracy Reso. Accuracy V

±1nA 100fA ±(0.5%+3pA+2fA×Vout) 10fA ±(0.5%+3pA+2fA×Vout) 100V

±10nA 1pA ±(0.5%+7pA+20fA×Vout) 10fA ±(0.5%+5pA+20fA×Vout) 100V

±100nA 10pA ±(0.12%+50pA+200fA×Vout) 100fA ±(0.1%+30pA+200fA×Vout) 100V

±1µA 100pA ±(0.12%+400pA+2pA×Vout) 1pA ±(0.1%+200pA+2pA×Vout) 100V

±10µA 1nA ±(0.12%+5nA+20pA×Vout) 10pA ±(0.1%+3nA+20pA×Vout) 100V

±100µA 10nA ±(0.12%+40nA+200pA×Vout) 100pA ±(0.1%+20nA+200pA×Vout 100V

±1mA 100nA ±(0.12%+500nA+2nA×Vout) 1nA ±(0.1%+300nA+2nA×Vout) 100V

±10mA 1µA ±(0.12%+4µA+20nA×Vout) 10nA ±(0.1%+2µA+20nA×Vout) 100V

±100mA 10µA ±(0.12%+50µA+200nA×Vout) 100nA ±(0.1%+30µA+200nA×Vout)

100V (Iout £20V), 40V (20mA<Iout£50mA), 20V (50mA<Iout£100mA)

Vout is the output voltage in volts. Iout is the output current in amps.

For example, accuracy specifications are given as ±% of set/measured

value (0.1%) plus offset value (30pA+200fA×Vout) for the 100nA range.

The offset value consists of a fixed part determined by the set/

measurement range and a proportional part that is multiplied by Vout.

MPSMU Measurement

and Output Range

100

20 40 100

Current (mA)

Voltage (V)

Output terminal/connection:

Single triaxial connector, non-Kelvin

(no remote sensing)

Voltage/Current Compliance (Limiting):

The SMU can limit output voltage or

current to prevent damaging the device

under test.

Voltage: 0 V to ±100 V

Current: ±1 pA to ±100 mA

Compliance Accuracy: Same as the

current (voltage) settling accuracy.

MPSMU Supplemental Information:

Typical voltage source output

resistance: 0.3

Voltage measurement input resistance/

current source output resistance:

³10

W (1 nA range)

Current compliance setting accuracy

foropposite polarity:

1nA to 10 nA range: V/I setting

accuracy ±12% of range

100 nA to 100 mA range: V/I setting

accuracy ±2.5% of range

VMU (Voltage Monitor Unit)

Specifications

VSU and VMU specifications are common to both the 4155C and 4156C

1 2 3 4 5 6 7 8 ... 11 12

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