Agilent Technologies E5500 Series Guía de usuario descargar pdf (Pagina 142)

Scanner Maintenance and Calibration 8

Agilent 5500 SPM User’s Guide 142

movement) and a single tube for Z motion. Since the range is small with

these scanners, the effect of cross-coupling is minimal.

Aging

Aging is a time-dependent effect in which the sensitivity (extension per

unit of field) of the scanner decreases, approximately exponentially,

over time. A large amount of decrease takes place during the first few

hours of use. Therefore, scanners are burned in before initial calibration.

After this initial burn-in, the aging rate is very slow; however,

calibration once or twice per year is still recommended.

Creep

At a constant applied voltage the piezo position will change slightly

over time, most noticeably at the beginning of a scan or after a change

on scan location. Creep appears as elongation of the feature in the

direction of the offset because of this slow movement (Figure 93).

Figure 93 Scanner creep

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Agilent Technologies E5500 Series Guía de usuario Pagina 142