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Máquina de reducción de ruido
E5500 Series
Guía de usuario
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Read This First
N9410-90001 Agilent 5500
SPM User’s Guide
7
T
echnologies, Inc. Furthermore, Agile
nt T
echnologies,
Inc. assumes
no
responsibility or liability for any
misinformation, errors, or general
inaccuracies that may appear in this manual.
1
2
3
4
5
6
7
8
9
10
11
12
...
231
232
Agilent Technologies
1
5500 Scanning Probe
1
Microscope
1
Specifications
4
Laser Safety Information
4
Power Supply
5
Piezo Scanner Precautions
6
General Care Requirements
6
Disclaimers
6
Declaration of Conformity
8
Contact Information
9
Table of Co ntents
10
Read This First
10
2 Agilent 5500 SPM Components
10
4 Preparing for Imaging
11
5 Contact Mode Imaging
12
6AC Modes
12
7 Additional Imaging Modes
12
9 Closed-Loop Scanners
13
10 MAC Mode
14
11 MAC III Mode
14
12 Liquid Cell
14
13 Temperature Control
14
14 Environmental Control
15
15 Electrochemistry
15
A Wiring Diagrams
15
Index
15
SPM Basics
18
SPM Techniques
20
Atomic Force Microscopy (AFM)
21
Contact Mode AFM
23
Intermittent Contact AFM
24
Acoustic AC (AAC) AFM
25
Current Sensing Mode (CSAFM)
27
Agilent 5500 SPM Components
32
Figure 10
33
Agilent 5500 SPM Components 2
35
Mode/Contact Mode imaging
37
Detector
40
Sample Plates
41
Video System
43
Head Electronics Box (HEB)
44
AFM Controller
45
Vibration Isolation Chamber
46
Software
47
System Options
48
Thermal K
50
Environmental Chamber
50
PicoTREC
51
PicoLITH
52
Facility Requirements
55
Utilities
56
Connecting the Components
58
Preparing for Imaging
59
One-Piece Nose Assembly
60
Preparing for Imaging 4
61
Two-Piece Nose Assembly
67
Aligning the Laser
72
Figure 52 Laser alignment
77
Mounting the Sample
83
Using the Video System
86
Contact Mode Imaging
92
Constant Force Mode
93
Constant Height Mode
100
Fine-Tuning the Image
100
Scan Settings
101
Contact Mode Imaging 5
102
AC Modes
103
Acoustic AC Mode (AAC)
104
AC Modes 6
106
and/or Y Offset values to
108
Magnetic AC (MAC) Mode
110
Standard MAC Mode
111
Q Control
112
Additional Imaging Modes
114
1 G 100 M
115
Current Sensing AFM (CSAFM)
119
Additional Imaging Modes 7
123
Kelvin Force Microscopy (KFM)
134
Agilent Technologies
137
Nose Assembly
138
Scanner Characteristics
139
Non-Linearity
140
Sensitivity
140
Hysteresis
140
Figure 92
141
Other Characteristics
141
Figure 93)
142
X Calibration
144
X Non-Linearity
145
X Hysteresis
146
Y Calibration
147
Y Non-Linearity
148
Y Hysteresis
149
Y Sensitivity
150
Z Calibration
151
Servo Gain Multiplier
152
Archive the Calibration Files
152
Closed-Loop Scanners
153
Calibration
154
set to 0.000
156
Z Sensor Calibration
158
Closed-Loop Scanners 9
160
MAC Mode
162
Connections
163
Hardware and Sample Setup
164
MAC Mode 10
165
MAC III Mode
166
Initial Setup
167
MAC III Mode 11
169
MAC III Software Controls
171
Contact Mode
172
Lock-In Tabs
183
Outputs Tab
185
Other Tab
188
Liquid Cell
190
Liquid Cell 12
191
Liquid Cell with MAC Mode
193
Flow-Through Liquid Cell
193
Temperature Control
194
Temperature Control 13
195
Do not use double-sided tape
200
Water Cooling
206
Environmental Control
209
Environmental Control 14
211
Glove Box
212
Electrochemistry
213
Modes or STM Mode
214
Electrochemistry 15
215
Equipment
216
Reference Electrode
217
Counter Electrode
217
Cleaning
218
Electrode Cleaning
219
Sample Plate Cleaning
219
Substrate Cleaning
219
Electrochemistry Definitions
220
Software Controls
221
Galvanostat
222
Wiring Diagrams
223
Appendix A
223
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