Agilent Technologies B1500A manuales

Manuales del propietario y guías del usuario para De medición, control y control Agilent Technologies B1500A.
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Agilent technologies B1500A Manual de servicio (110 paginas)

Marca: Agilent-technologies | Categoria: De medición, control y control | Tamaño: 3.34 MB |

Tabla de contenidos

Agilent B1500A

Semiconductor Device

Analyzer

Manual Part Number

Warranty

Technology Licenses

Restricted Rights Legend

In This Manual

Class Exercises

.xtr files

Demo.xpg file

.xtd files

1 ohm Resistor

1.1 kohm Resistor

511 kohm Resistor

0.1 uF Capacitor

Module 1. Introduction

Module 2. Getting Started

Module 5. Basic Measurement

Contents

Contents-8

5 Basic Measurement

In This Module

SMU Block Diagram

Basic Sweep Measurement

Sweep Measurement Modes

Combining VAR1, VAR1’, VAR2

Why Four SMUs?

Class Exercise

SMU Triax Connection

Wrong Triaxial Hookup

Jumper Leads – MOS transistor

To Import Demo Data

To Get Setup Data

Classic Test – Channel Setup

Do not abort on

Classic Test – Display Setup

To Start Measurement

Data Display Window – Graph

Data Display Window - List

Paste to Notepad

To Copy List Data

Application Test

Module 5

Basic Measurement

SMUs May Be Connected

200 V Resistor Sweep

200 V BVceo

Two SMUs in Series

Voltage across resistor

VR = V1-V2

VAR1' Ratio = -1

Measurement and Display Pages

Graphics Page 0 to 200 V

200 mA Output

Two SMUs in Parallel

Current in resistor

Itotal = I1+I2

VAR1' Ratio = 1

Resistor

Graphics Page 0 to 200 mA

Cabling and Fixturing Issues

Simplified Diagram

Kelvin Triaxial Cable

Why Kelvin Measurements?

Cable Connections

Class Example - Jumper Leads

2. Click Recall button

To Get REKELV Test Setup:

Single Kelvin Measurement

Non-Kelvin Measurement

To Kelvin Probe

To Guarded Chuck

Connector Plate

Guarded to within 2mm of tip

Single Triax Kelvin Triax

Triaxial Probes

Simplifying RF Connections

Interlock Connection

16493J-001 1.5 m cable

16493J-002 3.0 m cable

16442A/B Fixture

16058A Fixture Compatibility

6 Low Current Measurement

Low Current Measurement

What is possible?

Challenges

Clean Probing Environment

What is Required?

Where to Start?

Low Current

Calibration & Zero Cancel

Calibration

Measurements Near Zero fA

ZERO CHECK - No cable

Using Default SMU Setup

Delete SMU1 and SMU2

Change Mode to V and

Function to VAR1

ZERO CHECK

Channel Setup

Do not change this screen

Display Setup

Bumping cable

Bending Cable

Effect of cable movement

Appendix: Using ASU

Configuration

HRSMU+ASU

Low Current Subthreshold

SD214DE MOS Subthreshold

Trade Off Speed vs Accuracy

What is measured?

Low Current Gummel Plot

Module 6

Small step size

Negative sweep values

Range and Integration Time

100

Maximum resolution

100

Gummel Plot

100

LOW CURRENT MEASUREMENT

101

Gummel Plot With

102

ULTRA LOW CURRENT

103

Subthreshold Curve

103

Small STEP: 100 mV

104

Large HOLD TIME: 3 sec

104

Measurement Setup

104

Set long integration time

106

Leakage to fA levels

107

Chuck must be guarded

107

Fowler-Nordheim (FN) Plot

108

Negative sweep

109

Accumulation mode

109

Wait for 5 V initial step

109

FOWLER-NORDHEIM PLOT

109

Measurement Page

109

Low Current Gate Oxide Meas

110

Using Guarded Chuck

110

Agilent technologies B1500A Guía de usuario (628 paginas)

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Tabla de contenidos

Agilent B1500A

Manual Part Number

Warranty

Technol o gy Licenses

Restricted Rights Legend

Safety Summary

Safety Symbols

/HRSMU の場合は最大± 100

B1500 を設置すること。

Precautionary Statement

Working in Comfort

In This Manual

Online Documents

Utilities

Contents

1 Getting Started

To Turn On/Off B1500A

To Turn B1500A On

To Turn B1500A Off

To Launch EasyEXPERT

If Only One Workspace Exists

To Create Workspace

To Select Workspace

To Use Application Test Mode

Test Definitions

To Use Classic Test Mode

To Perform Measurement

To Use Test Result Editor

To Use Analysis Tools

2 Introduction

Application Library

Overview

Agilent EasyEXPERT Software

Front View

About screen adjustment

To disable the touch panel

Rear View

*1'8

&RPPRQ

About SMU

B1510A High Power SMU

B1511A Medium Power SMU

B1517A High Resolution SMU

To connect ASU

Before using 1 pA range

B1520A Multi Frequency CMU

300 k7 range

50 7 range

B1525A High Voltage SPGU

B1530A WGFMU

Specifications

Specification Conditions

Mainframe

MPSMU/HRSMU

Introduction

Measurement accuracy

Connection path control

value in mV)

SMU Common Specifications

SMU Supplemental Information

± 1 mV (HPSMU)

SCUU/GSWU

101

Point Time Voltage

107

Selector

108

Selector Adapter

108

WGFMU/RSU

109

Functions

113

Application library

113

Measurement mode details

114

Analysis capabilities

117

Auto analysis function

117

Graph plot

118

Other functions

118

Furnished Software

119

Features and benefits

120

System requirements

121

General Specifications

123

Accessories and Options

124

3 Installation

131

Requirements

133

Ventilation Requirements

134

Power Cable

134

Installation

135

Inspection and Installation

136

To Perform Initial Setup

137

Other Windows setup

138

To Change GPIB Address

139

To Enable System Controller

140

Installing Accessories

141

To Set up 16442B

142

To Connect 16442B

142

To Connect Connector Plate

144

To Connect ASU

147

Figure 3-2 To Connect ASU

149

About ASU output cables

150

To Connect SCUU/GSWU

151

6&88

152

About SCUU output cables

153

To Connect GNDU Adapter

155

To Interconnect SPGUs

156

Mounting Connectors

157

 ï    ï0[

158

   

158

To Make an Interlock Circuit

159

To Connect GNDU Output

162

To Connect SMU Output

163

To Minimize Leakage Current

164

To Connect MFCMU Output

169

Stop key

170

Using Test Fixture

171

6089 $0D[

172

'UDLQ

172

6XEVWUDWH

172

To Reduce Leakage Current

173

'87

174

To Measure Low Resistance

175

Switching Matrix

177

Required Conditions

178

)25&(RU6(16($

183

)25&(RU6(16(%

183

,QVXODWRU

183

7ULD[LDO&DEOH

183

Maintenance

185

About Plug-in Modules

186

Module Type and Locations

187

4 Using EasyEXPERT

189

Touch Screen Operation

191

Start EasyEXPERT

192

Workspace Configurator

193

If there is one workspace

194

Using EasyEXPERT

196

Main Screen

198

Main Screen GUI

199

Run Option

206

Data Display Manager

207

Data Display Properties

208

Test Result Editor

209

Test Results Data Filter

210

Export in My Format

210

Test Results Data Auto Export

212

Test Results Data Properties

214

Application Test

215

Quick Test

217

Repeat Measurement Setup

219

Organize Preset Group

221

Calibration

223

SMU Zero Cancel

224

CMU Calibration

225

Configuration

229

SMU/PG Selector

233

Event Log

233

Extended Configuration

234

Standby Channel Definition

238

Data Display

239

About Display Mode

240

Updating Data Calculation

240

Append Measurement

240

Multi Display Function

240

Data Display GUI

241

EPSHPIJLIRUSQJIRUPDW

242

&RS\WR&OLSERDUG

244

3DVWHWR:RUG3DG

244

3DVWHWR1RWHSDG

244

Display Setup

250

Graph Properties

251

List Display Properties

252

Tool Bar

252

Data Status

255

Mouse/Touch Panel

256

Rotary Knob

256

Softkeys

256

Keyboard

257

Preview Window GUI

262

Preview Settings

264

Text File Export settings

265

5Classic Test Definition

269

If You Use GNDU (Ground Unit)

271

I/V Sweep

272

Channel Setup

273

Measurement Setup

274

+ Ratio × VAR1 outpu

275

Offset value

275

Multi Channel I/V Sweep

277

I/V List Sweep

281

Define vector data

286

I/V-t Sampling

289

C-V Sweep

294

Direct Control

298

Advanced Setup

302

Primary Setup

303

Command Setup

304

ReadDataBuffer

305

Function Setup

310

Auto Analysis Setup

311

Classic Test Definition

315

SMU Range Setup Window

316

To use 1 pA range

317

Advanced Setup Window

319

CMU Range Setup Window

321

Switching Matrix Control

323

SPGU Control

325

SPGU Pulse Setup Window

327

Load Z Setup Window

329

Pulse Switch Setup Window

330

SPGU ALWG Setup Window

331

Define ALWG Waveform Window

332

Waveform Pattern Editor

335

6 Application Test Definition

337

Test Definition Window

339

Test Specification

341

Define Layout GUI

346

Properties

348

To Select Entry Fields

349

To Move Entry Fields

349

Test Output

350

Analysis Parameter Definition

351

Test Contents

352

Debugging Test Contents

357

Variable Inspector

358

External Variable Setup

359

Local Variable Definition

360

Program Component

362

Auto Analysis

363

Data Display Control

366

Display Data Setup

367

GPIB I/O

369

Data Store Control

375

Command Execution

376

Using Command Execution

378

Defining Format Field

381

Setup Example

382

7 Function Details

383

• “SMU CMU Unify Unit”

384

I/V Sweep Measurement

385

Output Range

386

Basic Sweep Measurement

386

Pulsed Sweep Measurement

391

Function Details

393

Figure 7-7 SMU Pulse

393

Voltage or current

394

I/V-t Sampling Measurement

395

Time data and index

396

Setup Parameters

397

Time Data and Index

399

Stop Condition

400

C-V Sweep Measurement

401

About Impedance Measurements

403

Error Correction

406

SPGU Module

408

PG Operation Mode

409

SPGU Pulse Setup Parameters

410

Simultaneous output:

412

Sequencial output:

412

ALWG Operation Mode

416

Sweep Abort Function

418

Standby Function

419

To Use Standby Function

421

Bias Hold Function

422

Current Offset Cancel

424

Module type

425

SMU CMU Unify Unit

426

Before using SCUU

427

Atto Sense and Switch Unit

428

Before using ASU

429

SMU Ranging Mode

431

Auto Ranging

432

Limited Auto Ranging

433

Fixed Range

433

Compliance Range

433

SMU Compliance

435

Power Compliance

436

To Set Compliance

437

SMU Pulse

438

SMU Measurement Time

439

Overhead Time

441

To Specify Source Output Time

441

Wait Time

442

Multiple Measurement Channels

443

SMU Filter

444

SMU Series Resistor

445

Interlock Function

446

Auto Power Off Function

447

Initial Settings

448

8 Built-in Programming Tool

451

Variables and Expressions

453

Constants

454

Literals

455

Built-in Functions

456

Read Out Functions

456

B=delta(A)

459

C=diff(A,B)

459

C=integ(A,B)

461

B=isValid(A)

461

B=lgt(A)

461

B=log(A)

462

C=mavg(A,B)

462

B=string(A)

464

B=swmToModule(A)

464

B=tan(A)

464

B=value(A)

464

Functions for Line

466

Script Program Statements

469

Built-in Programming Tool

474

9 If You Have a Problem

475

When You Operate B1500A

477

ASU is not Detected

478

To Simplify the Connections

479

When You Perform Measurement

480

Measurements

482

Measurement

484

To Make Backup

486

To Check Module Slots

486

Data Backup and Recovery

488

Folders to Backup

489

To Make Database Backup

489

To Restore Database Backup

490

To Make Backup of Other Data

491

B1500A System Recovery

493

To Initialize Database

494

To Restore Database

495

Updating EasyEXPERT

496

Error Codes

497

Agilent FLEX Execution Error

522

AC test

540

3465 IM short test failed

544

If You Have a Problem

552

Application Test Definitions

555

B1500A SMU 2

564

Maximum Measurement Value

565

Capacitance (F)

566

HPSMU/MPSMU/HRSMU/ASU

568

Reading Accuracy (%)

576

Offset Accuracy (F)

576

License Management Tool

601

Setup File Converter

602

Setup File Converter GUI

603

Utility Programs

604

SetupFileConverter.exe

605

hu¿hÉ_uU=Ë

614

uËh¿É_uU=Ë

614

Desktop EasyEXPERT

619

About Desktop EasyEXPERT

620

System Requirements

621

To Install Desktop EasyEXPERT

622

To Start Desktop EasyEXPERT

623

Execution Mode dialog box

623

Start EasyEXPERT window

624

Using 4155B/4156B/4155C/4156C

626

Agilent technologies B1500A Manual de servicio (598 paginas)

Marca: Agilent-technologies | Categoria: De medición, control y control | Tamaño: 3.05 MB |

Tabla de contenidos

Agilent B1500A/B1505A

Manual Part Number

Warranty

Technol o gy Licenses

Restricted Rights Legend

For B1500A Users

For B1505A Users

In This Manual

Contents

1 Programming Basics

10 ASSIGN @B1500 TO 717

Before Starting

FlexGUI Window

Settings dialog box

Getting Started

To Reset the Agilent B1500

To Read Query Response

To Perform Self-Test

To Perform Self-Calibration

To Perform Diagnostics

To Force Voltage/Current

To Set the Measurement Range

To Pause Command Execution

To Start Measurement

To F orce 0 V

To Control ASU

To Control SCUU

To Read Error Code/Message

To Read Spot Measurement Data

To Read Time Stamp Data

Alpha Character

(A to Z, a to z)

Numeric Data

Terminator

Special Terminator

Separator

Data Output Format

ASCII Data Output Format

Data Format

Data Elements

Binary Data Output Format

Data Resolution

Byte 1 Byte 2 Byte 3 Byte 4

AB C D E F

8 Bytes Data Elements

GPIB Interface Capability

Status Byte

Programming Tips

To Confirm the Operation

GOC, SOC

Programming Basics

2 Remote Mode Functions

Measurement Modes

Voltage or current

100

Binary Search Measurements

106

Linear Search Measurements

108

Sampling Measurements

110

Quasi-static CV Measurements

113

Capacitance Data

115

Spot C Measurements

116

Pulsed Spot C Measurements

117

Pulsed Sweep CV Measurements

122

C-f Sweep Measurements

124

AC signal level

126

C-t Sampling Measurements

128

Synchronous Output

130

Automatic Abort Function

132

Parallel Measurement Function

134

Program Memory

135

Dual HCSMU

138

SPGU Module

139

SPGU DC bias output

140

SPGU Channel Status

140

PG Operation Mode

141

Remote Mode Functions

143

ALWG Operation Mode

145

Module Selector

150

External Relay Control Output

151

SMU/PG Selector

152

HVSMU force is

154

connected to

154

HVSMU Current Expander

155

Ultra High Voltage Expander

156

Digital I/O Port

157

Accessories

158

Digital I/O Internal Circuit

159

Trigger Function

160

Trigger Input

161

Trigger Output

163

Using Trigger Function

166

To Send Trigger Using OS/OSX

167

Start measurement

168

Measurement completion

168

Ext Trig In

168

Ext Trig Out

168

Hold time

171

Delay time or more

171

Step delay time or more

171

Source trigger delay

171

Measurement trigger delay

171

Trig In/Out Internal Circuit

172

Initial Settings

173

3 Programming Examples

179

About Example Program Code

181

To Start Program

181

To Create Measurement Program

183

High-Speed Spot Measurements

187

Spot Measurements

190

Pulsed Spot Measurements

193

Staircase Sweep Measurements

196

Pulsed Sweep Measurements

206

," & igcomp

218

Programming Examples

238

Measurement

238

Result Example

238

Data save completed

248

Using Program Memory

290

Tips to use program memory

291

Reading Time Stamp Data

308

Reading Binary Output Data

309

Using Programs for 4142B

312

4 Command Reference

317

Command Summary

319

Sets the timing parameters

326

Command Parameters

331

Before using 1 pA range

334

Output ranging

337

50 Ω range

347

300 kΩ range

347

Command Reference

348

. This function is

360

,abort[,post]

367

CORRSER?

382

,corr,state

385

,corr,mode,primary,secondary

386

DSMPLARM

390

DSMPLFLUSH

391

DSMPLSETUP

392

ERHVCTST?

402

[,option]

405

ERPFTEMP?

413

ERPFUHCA

413

ERPFUHCA?

414

ERPFUHCCAL?

414

ERPFUHCMAX?

414

ERPFUHCTST?

415

INTLKVTH

425

INTLKVTH?

425

[,Vcomp]]

433

[,Icomp]] or

433

for the

481

Example

482

To use ASU

487

To use SCUU

501

5 Error Messages

555

Operation Error

557

Self-test/Calibration Error

584

3465 IM short test failed

588

Agilent technologies B1500A Guía de usuario (208 paginas)

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Tabla de contenidos

Agilent B1500A

Manual Part Number

Warranty

Technol o gy Licenses

Restricted Rights Legend

In This Manual

Contents

1 Installation

System Requirements

Before Programming

2 Driver Functions

Additional information

Function List

Parameters

Auto ranging mode

Limited auto ranging mode

Status Code

Function Reference

To use ASU

ViSession vi;

ViStatus ret;

ViPBoolean result;

To use SCUU

3 Programming Examples for

Visual Basic Users

To Create Measurement Program

100

High Speed Spot Measurement

101

Pulsed Spot Measurement

108

Staircase Sweep Measurement

112

Measurement

117

Result Example

117

Pulsed Sweep Measurement

138

Breakdown Voltage Measurement

150

Leakage Current Measurement

153

4 Programming Examples for

157

C++ Users

157

About Program Code

158

To Start Program

158

Programming Basics

159

Sampling Measurement

197

High Speed Spot C Measurement

201

CV Sweep Measurement

205

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Tabla de contenidos

Agilent B1500A

Safety Summary

Safety Symbols

&$7

v¨O½v¶´

Product Stewardship

Precautionary Statement

Working in Comfort

In This Manual

Contents

1 Getting Started

+ agb1500a

+ UsbDevice1

To Turn B1500A On

To Turn B1500A Off

To Launch EasyEXPERT

If Only One Workspace Exists

To Create Workspace

To Select Workspace

To Use Tracer Test Mode

To Use Application Test Mode

Test Definitions

To Use Classic Test Mode

To Perform Measurement

To Use Test Result Editor

To Use Analysis Tools

2 Introduction

Application Library

Overview

Agilent EasyEXPERT Software

Front View

Rear View

GNDU - Ground Unit

*1'8

&RPPRQ

About SMU

HPSMU - High Power SMU

MPSMU - Medium Power SMU

To connect ASU

Before using 1 pA range

MCSMU - Medium Current SMU

HRSMU - High Resolution SMU

MFCMU - Multi Frequency CMU

300 k7 range

50 7 range

HVSPGU - High Voltage SPGU

3 Installation

Power Requirements

Operating Environment

Installation Requirements

Power Cable

Requirements

Inspection and Installation

To Perform Initial Setup

To Change GPIB Address

To Enable System Controller

Installing Accessories

To Set up 16442B (B1500A-A5F)

To Connect Connector Plate

To Connect ASU

About ASU output cables

To Connect SCUU/GSWU

6&88

100

About SCUU output cables

101

To Connect GNDU Adapter

103

Selection switch SW2 and SW4

105

Input Panel

106

Output Panel

106

Mounting Connectors

107

 ï    ï0[

108

   

108

To Make an Interlock Circuit

109

Connector side

109

Interlock switch

109

Wiring side

109

Installation

111

To Connect GNDU Output

112

To Connect SMU Output

113

To Minimize Leakage Current

114

To Connect MCSMU Output

119

To Connect MFCMU Output

120

Stop key

121

Using Test Fixture

122

6089 $0D[

123

'UDLQ

123

6XEVWUDWH

123

Using Connector Plate

124

To Reduce Leakage Current

124

'87

125

To Measure Low Resistance

126

Switching Matrix

128

Required Conditions

129

)25&(RU6(16($

134

)25&(RU6(16(%

134

,QVXODWRU

134

7ULD[LDO&DEOH

134

Cleaning

136

Self-test and Diagnostics

136

Calibration

136

Module Type and Locations

137

To Interconnect SPGUs

138

To Interconnect WGFMUs

139

About Module Installation

140

4 Specifications

141

Hardware

143

Specification Conditions

143

Supported Plug-in Modules

144

Maximum Module Configuration

146

Ground Unit (GNDU)

147

MPSMU/HRSMU

148

Specifications

149

Connect ASU to dedicated SMU

151

Connection path control

151

SMU Common Specifications

157

± 1 mV (HPSMU)

161

SCUU/GSWU

167

: < 100 V at 300 sec

168

Point Time Voltage

173

Selector

174

Selector Adapter

174

WGFMU/RSU

175

EasyEXPERT Software

182

Operation mode

182

Application library

182

Oscilloscope view

183

Measurement modes

184

Sweep measurement

184

Data display

186

Automatic analysis function

187

Arithmetic functions

187

Workspace and data management

188

External instrument control

188

Furnished Software

189

Desktop EasyEXPERT Software

190

General Specifications

191

5 Accessories and Options

193

Agilent technologies B1500A Guía de usuario (204 paginas)

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Tabla de contenidos

Keysight Technologies B1500A

Semiconductor Device Analyzer

Safety Summary

Safety Symbols

Circuit Common

Product Stewardship

Precautionary Statement

Working in Comfort

In This Manual

Contents

1 Getting Started

+ agb1500a

+ UsbDevice1

To Turn B1500A On

To Turn B1500A Off

To Launch EasyEXPERT

If Only One Workspace Exists

To Create Workspace

To Select Workspace

To Use Tracer Test Mode

To Use Application Test Mode

Test Definitions

To Use Classic Test Mode

To Perform Measurement

To Use Test Result Editor

To Use Analysis Tools

2Introduction

Application Library

Overview

Keysight EasyEXPERT Software

Front View

Rear View

Measurement Modules

About SMU

HPSMU - High Power SMU

MPSMU - Medium Power SMU

To connect ASU

Before using 1 pA range

MCSMU - Medium Current SMU

HRSMU - High Resolution SMU

MFCMU - Multi Frequency CMU

300 k7 range

50 7 range

HVSPGU - High Voltage SPGU

3 Installation

Requirements

Installation Requirements

Power Cable

Inspection and Installation

To Perform Initial Setup

To Change GPIB Address

To Enable System Controller

Installing Accessories

To Set up 16442B (B1500A-A5F)

To Connect Connector Plate

To Connect ASU

About ASU output cables

To Connect SCUU/GSWU

About SCUU output cables

101

Connector handle

103

Banana jack

103

Selection switch SW2 and SW4

105

Input Panel

106

Output Panel

106

Mounting Connectors

107

2 − 11.3 3.2 2 − M3 x 0.5

108

14 11 11 14

108

Connector side

109

Interlock switch

109

Wiring side

109

Installation

111

To Connect GNDU Output

112

To Connect SMU Output

113

To Minimize Leakage Current

114

To Connect MCSMU Output

119

To Connect MFCMU Output

120

Stop key

121

Using Test Fixture

122

SMU(±200V= 1A Max)

123

Substrate

123

To Reduce Leakage Current

124

To Measure Low Resistance

126

Switching Matrix

128

Required Conditions

129

FORCE or SENSE (A)

134

FORCE or SENSE (B)

134

Insulator

134

Triaxial Cable

134

Maintenance

136

About Plug-in Modules

137

To Interconnect SPGUs

138

To Interconnect WGFMUs

139

About Module Installation

140

4 Specifications

141

Specification Conditions

143

Supported Plug-in Modules

144

Maximum Module Configuration

146

Ground Unit (GNDU)

147

MPSMU/HRSMU

148

Specifications

149

Hardware

149

Connect ASU to dedicated SMU

151

Connection path control

151

SMU Common Specifications

157

± 1 mV (HPSMU)

161

SCUU/GSWU

167

V at 300 sec

168

Point Time Voltage

173

Selector

174

Selector Adapter

174

WGFMU/RSU

175

Operation mode

182

Application library

182

Oscilloscope view

183

Measurement modes

184

Sweep measurement

184

Data display

186

Automatic analysis function

187

Arithmetic functions

187

Workspace and data management

188

External instrument control

188

Furnished Software

189

Desktop EasyEXPERT Software

190

General Specifications

191

5 Accessories and Options

193

*B1500-90000*

204

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