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Agilent B1500A/B1505A Programming Guide, Edition 11 2-53
Remote Mode Functions
SPGU Module
SPGU Module
SPGU is the pulse generator module designed for the semiconductor parametric test
application and provides the following key functions.
• Number of output channels: 2 channels per module
• Output impedance: 50 Ω
• Output level: 0 to ± 40 V (open load), ± 20 V (50 Ω load)
• SPGU operation mode (effective for all channels installed in B1500A):
PG (pulse generator) or ALWG (arbitrary linear waveform generator)
• Channel output operation mode:
Free run, count, or duration
• PG output mode:
2-level pulse, 3-level pulse, or DC bias. For each channel.
• Terminal voltage measurement and load impedance calculation
• Automatic level adjustment by using load impedance measured or specified
• Pulse switch, which is more durable than mechanical relays, and better suited for
frequent switching applications.
Figure 2-29 SPGU Simplified Block Diagram
50 ohm
Pulse switch
ALWG
PG
2-level
or 3-level
Output 2
or
50 ohm
Pulse switch
ALWG
PG
2-level
or 3-level
Output 1
or
- Agilent B1500A/B1505A 1
- Manual Part Number 2
- Warranty 2
- Technol o gy Licenses 2
- Restricted Rights Legend 2
- For B1500A Users 3
- For B1505A Users 3
- In This Manual 4
- Contents 10
- 1 Programming Basics 19
- 10 ASSIGN @B1500 TO 717 20
- Before Starting 21
- FlexGUI Window 22
- Settings dialog box 24
- Getting Started 25
- To Reset the Agilent B1500 26
- To Read Query Response 26
- To Perform Self-Test 26
- To Perform Self-Calibration 26
- To Perform Diagnostics 27
- To Force Voltage/Current 30
- To Set the Measurement Range 32
- To Pause Command Execution 33
- To Start Measurement 33
- To F orce 0 V 33
- To Control ASU 34
- To Control SCUU 35
- To Read Error Code/Message 36
- To Read Spot Measurement Data 36
- To Read Time Stamp Data 38
- Alpha Character 40
- (A to Z, a to z) 40
- Numeric Data 41
- Terminator 42
- Special Terminator 42
- Separator 42
- Data Output Format 43
- ASCII Data Output Format 44
- Data Format 45
- Data Elements 48
- Binary Data Output Format 54
- Data Resolution 55
- Byte 1 Byte 2 Byte 3 Byte 4 59
- AB C D E F 59
- 8 Bytes Data Elements 66
- GPIB Interface Capability 73
- Status Byte 74
- Programming Tips 76
- To Confirm the Operation 77
- GOC, SOC 84
- Programming Basics 86
- 2 Remote Mode Functions 87
- Measurement Modes 89
- Voltage or current 100
- Binary Search Measurements 106
- Linear Search Measurements 108
- Sampling Measurements 110
- Quasi-static CV Measurements 113
- Capacitance Data 115
- Spot C Measurements 116
- Pulsed Spot C Measurements 117
- Pulsed Sweep CV Measurements 122
- C-f Sweep Measurements 124
- AC signal level 126
- C-t Sampling Measurements 128
- Synchronous Output 130
- Automatic Abort Function 132
- Parallel Measurement Function 134
- Program Memory 135
- Dual HCSMU 138
- SPGU Module 139
- SPGU DC bias output 140
- SPGU Channel Status 140
- PG Operation Mode 141
- Remote Mode Functions 143
- ALWG Operation Mode 145
- Module Selector 150
- External Relay Control Output 151
- SMU/PG Selector 152
- HVSMU force is 154
- connected to 154
- HVSMU Current Expander 155
- Ultra High Voltage Expander 156
- Digital I/O Port 157
- Accessories 158
- Digital I/O Internal Circuit 159
- Trigger Function 160
- Trigger Input 161
- Trigger Output 163
- Using Trigger Function 166
- To Send Trigger Using OS/OSX 167
- Start measurement 168
- Measurement completion 168
- Ext Trig In 168
- Ext Trig Out 168
- Hold time 171
- Delay time or more 171
- Step delay time or more 171
- Source trigger delay 171
- Measurement trigger delay 171
- Trig In/Out Internal Circuit 172
- Initial Settings 173
- 3 Programming Examples 179
- About Example Program Code 181
- To Start Program 181
- To Create Measurement Program 183
- High-Speed Spot Measurements 187
- Spot Measurements 190
- Pulsed Spot Measurements 193
- Staircase Sweep Measurements 196
- Pulsed Sweep Measurements 206
- ," & igcomp 218
- Programming Examples 238
- Measurement 238
- Result Example 238
- Data save completed 248
- Using Program Memory 290
- Tips to use program memory 291
- Reading Time Stamp Data 308
- Reading Binary Output Data 309
- Using Programs for 4142B 312
- 4 Command Reference 317
- Command Summary 319
- Sets the timing parameters 326
- Command Parameters 331
- Before using 1 pA range 334
- Output ranging 337
- 50 Ω range 347
- 300 kΩ range 347
- Command Reference 348
- . This function is 360
- ,abort[,post] 367
- CORRSER? 382
- ,corr,state 385
- ,corr,mode,primary,secondary 386
- DSMPLARM 390
- DSMPLFLUSH 391
- DSMPLSETUP 392
- ERHVCTST? 402
- [,option] 405
- ERPFTEMP? 413
- ERPFUHCA 413
- ERPFUHCA? 414
- ERPFUHCCAL? 414
- ERPFUHCMAX? 414
- ERPFUHCTST? 415
- INTLKVTH 425
- INTLKVTH? 425
- [,Vcomp]] 433
- [,Icomp]] or 433
- for the 481
- Example 482
- To use ASU 487
- To use SCUU 501
- 5 Error Messages 555
- Operation Error 557
- Self-test/Calibration Error 584
- 3465 IM short test failed 588
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